Microlithography Filtration: Enables Shrinking Device Geometries

Die Mikrolithographie ist ein wesentlicher technologischer Motor in der Halbleiterbranche. The industry’s continued growth is a direct result of improved lithographic resolution. The complexity of today’s fabricated semiconductor chips necessitates the use of numerous microlithographic steps to achieve multilevel circuits.

Please view the pdf below for application information and compatibility guide.

Microlithography Introduction   

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